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Re: [OM] More on LCD shutters

Subject: Re: [OM] More on LCD shutters
From: "Jim Terazawa" <jimt@xxxxxxxxxxxxxx>
Date: Fri, 18 Sep 1998 15:33:28 -0500 (CDT)
Cc: jimt@xxxxxxxxxxxxxx (Jim Terazawa)
The technique of pellicle coating on the mirror, I believe patented
by Canon, where the reticle glasses to pattern the images of the
semiconductor devices onto the silicon wafers (called direct stepping
on wafer, aka DSW or the stepper operation) is widely used.

Regards,
Jim Terazawa


> 
> In a message dated 9/18/98 1:48:10 PM Eastern Daylight Time,
> pizzuto@xxxxxxxxxxxxxxx writes:
> 
> << I think they use a material that reflects 1/3 of the
>  light to the prism, and 2/3 to the film.  The curtains then simply
>  control when the exposure occurs. >>
> 
> This is the way I understand it works too. They call it a "pellicle" mirror.
> Not sure if thats a technical term or a marketing one.
> 
> Paul Schings
> Coventry, RI
> 

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